Ionized-Cluster Beam Deposition and Epitaxy - Toshinori Takagi - Google Books

https://books.google.de/books?id=4xv3-ylu1VMC&pg=PA6#v=onepage

The technique of ionized-cluster beam (ICB) deposition, the fundamentals of ICB technology, and technical applications of thin films produced by ICB deposition are presented in a single volume to give a coherent presentation to all those interested or…