Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition ... - Google Books

https://books.google.de/books?id=bBjpoLsyycMC&pg=PA356#v=onepage

An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.