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Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition ... - Google Books
https://books.google.de/books?id=bBjpoLsyycMC&pg=PA356#v=onepage
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.