Introduction to Microfabrication - Sami Franssila - Google Books

https://books.google.de/books?id=3Mw8fBKgUOAC&pg=PA316#v=onepage

Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are…